The instructor for each lecture is provided below according to the following key:
MAS = Martin Schmidt
RCOH = Robert O' Handley
SR = Susan Ruff
A note on CI-M: CI-M refers to the "Communication Intensive in the Major" requirement for juniors and seniors. CIM courses practice forms of communication that are specific to the professional and academic culture of the discipline.
| LEC # | topics | LecturerS |
|---|---|---|
| 1 | Overview/Safety/Lab Assignment (PDF) CI-M: Introduction to CI-M | MAS SR |
| 2 | IC Lab - Overview (PDF) | MAS |
| 3 | Oxidation | MAS |
| 4 | Diffusion ( PDF - 4.5 MB) | RCOH |
| 5 | IC Lab: Testing (PDF) CI-M: Writing Technical Reports (PDF) | MAS SR |
| 6 | Diffusion/Implantation (PDF) | RCOH |
| 7 | MEMS Lab: Overview (PDF) | MAS |
| 8 | Vacuum System (PDF) | RCOH |
| 9 | CVD (PDF) | RCOH |
| 10 | Sputtering (PDF) CI-M: Feedback on IC Report, Reports Returned (PDF) | RCOH SR |
| 11 | Fluids Lab: Overview | MAS |
| 12 | Evaporation (PDF - 2.6 MB) | RCOH |
| 13 | MEMS Lab: Testing (PDF - 1.6 MB) | MAS |
| 14 | Lithography | MAS |
| 15 | Lithography, Soft Lithography | MAS |
| 16 | Etching (Wet) (PDF - 3.5 MB) | RCOH |
| 17 | Etching (Dry) (PDF) | RCOH |
| 18 | CMOS | MAS |
| 19 | Advanced Silicon Devices | MAS |
| 20 | Fluids Lab: Testing (PDF) | MAS |
| 21 | Take Home Introduction / Patents (PDF) | MAS |
| 22 | Take Home Discussion (PDF) | MAS |
| 23 | Advanced Topics (Guest) | |
| 24 | Advanced Topics (cont.) (Guest) | |
| 25 | Analog Devices Fab Tour |