MEMS is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. MEMS promises the realization of a complete "system-on-a-clip" --- miniaturization of a whole system that can not only "think", but also "observe" and "act".

The inset image shows a mite next to a gear set produced using MEMS. The mite is approximately one millimeter long.

Image credit: Sandia National Laboratories.